The probe station transmits test signals from the measuring instrument or tester to various devices on the wafer via probes or probe cards, and acquires signal feedback from each device. By collecting these signals, various electrical characteristics of the chip can be tested, such as voltage, current, and timing.
Case Details
Probe StationThe probe station transmits test signals from the measuring instrument or tester to various devices on the wafer via probes or probe cards, and acquires signal feedback from each device. By collecting these signals, various electrical characteristics of the chip can be tested, such as voltage, current, and timing.
Industry ChallengesInsufficient UPH Efficiency
Increasing capacity requirements necessitate continuous efficiency optimization.
High Probe Wear
Frequent Z-axis rise and fall cause probe wear.
High Signal Interference
Compact electrical cabinets lead to severe interference.
Solution FeaturesShort Communication Time
Provides gate-type motion commands, reducing unnecessary trajectory time. 3-in-1 command reduces software and card interaction time.
Smooth Movement
µs-level pulse cycles ensure smoother pulse frequency changes. Simultaneously, the drive suppresses motor jitter under static conditions, reducing probe wear.
Low Interference
Built-in magnetic ring + anti-interference IPM module in the drive reduces interference at the source.
Customizable Functions
Customized processes for edge finding and probes to meet customer needs.
Value RealizedCommand Time: 2µs
Edge Finding Function: 3s per cycle
Customized Probe Function: Multiple IO Triggered Emergency Stop
